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Processing of thin Layers

Spin Coater - Laurell-WS-400B-6NPP-LITE

  • objects to be coated max. Ø 150 mm, max. 102x102 mm²
  • max. 10.000 U/min (standard wafer 100 mm)
  • process controller with 20 presets for cycles with up to 51 steps
  • acceleration and deceleration can be programmed for each step

Dip Coater - Prototype

  • path controlled cycles (Systec Driveset M108)
  • velocity up to 0,4 m/s
  • accuracy class: 0,1 mm
  • samples up to 50x50 mm²

Environmental Chamber - BINDER KBF 240a

  • internal volume 240 l, 800x600x500 mm³ (WxHxD)
  • temperature range without humidity from -10ºC to +100ºC
  • temperature range with humidity from +10ºC to +90ºC
  • humidity range from 10% r.H. (>40ºC) to 90% r.H. (<70ºC)
  • program mode for up to 25 temperature and humidity cycles with up to 100 program steps

Vacuum drying oven - Shel Lab SVAC 1-2

  • Internal volume: 16 l, 450x580x600 mm³ (WxHxD)
  • temperature range: 10°C above ambient temperature up to +220°C
  • heating time: 90 minutes to 150°C
  • vacuum range: -3 to - 76 cmHg
SpinCoater

Spin Coater

DipCoater

Dip Coater

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