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Surface Characterization

Rasterkraftmikroskop - AFM - Nano Wizard 4

  • Application: Measurement of surface features up to atomic resolution
  • Various modes available (more information on the AFM page)

Profilometer - Form Talysurf Laser Series 2 - AMETEK Taylor Hobson

  • application: measurement of geometric surface features (form, waviness, roughness)
  • measurement method: tactile
  • measuring range - 2D: x = 120 mm, z = ± 3 mm or ± 6 mm
  • measuring range - 3D: x = 120 mm, y = 100 mm, z = ± 3 mm or ± 6 mm

White Light Interference Microscope - Talysurf CCI HD - AMETEK Taylor Hobson

  • measurement method: optical/ white light interferometry (vertical scanning interferometry)
  • measuring range: x = 100 mm, y = 80 mm, z = 2.2 mm

3D CNC Multisensor Coordinate Measuring Machine - ScopeCheck 200 - Werth Messtechnik

  • measurement method: optical (image processing sensor) or tactile
  • measuring range: x = 200 mm, y = 150 mm, z = 150 mm
  • illumination: transmitted light, reflected-light brightfield, darkfield reflection

Laser Position Sensor - Keyence LK-G10

  • application: Measurement of layer thickness
  • measurement method: laser triangulation (1D)
  • measuring range: +/- 1 mm
  • high precision: +/- 0.02 %
  • reference distance: 10 mm
  • spot size: D=20 µm
  • light source: 650 nm / laser class 1 / 0.3 mW
  • sample rate: 50 kHz

Confocal Digital Microscope - Keyence VHX

  • magnification: 100x to 2500x (5000x)
  • illumination: incident brightfield and darkfield reflection
  • lens: long distance

Polarizing Microscope - JENAPOL - Carl Zeiss Jena

  • all polarization methods in incident brightfield illumination
  • positive and negative phase contrast
  • incident brightfield and darkfield reflection illumination for all lenses
  • 2-axis table
  • photo output with digital photographic equipment, 3000 x 2000 pixels

Stereo Microscope - MOTIC DMO 456

  • wide-angle eyepiece w10x/ 20mm
  • zoom lens 1x to 4x, 1:4 ratio
  • incident and transmitted halogen illumination
  • video, image and image sequence recordings (camera 2 MP), USB port
Atomic Force Microscope

Atomic Force Microscope

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